Senichi Nishibe
at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Polymethylmethacrylate, Etching, Silicon, Inspection, Scanning electron microscopy, Scatterometry, Directed self assembly, Critical dimension metrology, Semiconducting wafers, Single crystal X-ray diffraction

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