Dr. Shaowen Gao
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Data modeling, Machine learning, Semiconducting wafers, Defect detection, Statistical modeling, Optics manufacturing, Optical proximity correction, Wafer-level optics, Feature extraction, High volume manufacturing

Proceedings Article | 28 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Optical proximity correction, Failure analysis, Semiconducting wafers, Calibration, Data modeling, Photomasks, Inspection, Optics manufacturing, Bridges, Finite element methods

Proceedings Article | 16 October 2017
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Silicon, Optical proximity correction, Critical dimension metrology, Image processing, Lithography, Data modeling, Metrology, Semiconducting wafers, Statistical analysis, Scanning electron microscopy

Proceedings Article | 23 March 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Photomasks, Lithography, Optical proximity correction, Double patterning technology, Optical lithography, Design for manufacturability, Manufacturing, Lithographic illumination, Semiconductors, Logic devices, Printing, Photovoltaics, Analog electronics, Etching, Line width roughness, SRAF

Proceedings Article | 29 March 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Diffusion, Critical dimension metrology, Polymers, Photoresist processing, Image processing, Manufacturing, Lithography, Optical lithography, Data modeling, Modulation

Showing 5 of 6 publications
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