Sooraj Shiby
PhD scholar at Indian Institute of Technology Madras
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 19, 2018
Proc. SPIE. 10520, Laser-based Micro- and Nanoprocessing XII
KEYWORDS: Thin films, Etching, Copper, Ions, Laser ablation, Wet etching, Chlorine, Laser beam diagnostics, Plasma

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