Mr. Stenio Pereira Profile

Stenio Pereira

at IDEX Health & Science LLC

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Publications (1)

Proceedings Article | 23 March 2012 Paper

Sub-atmospheric gas purification for EUVL vacuum environment control

Abneesh Srivastava, Stenio Pereira, Thomas Gaffney

Proceedings Volume 8322, 83222U (2012) https://doi.org/10.1117/12.916084

KEYWORDS: Extreme ultraviolet lithography, Switches, Extreme ultraviolet, EUV optics, Reflectivity, Hydrogen, Gases, Switching, Contamination, Nitrogen

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