Ms. Sachiko Shinjo Profile

Sachiko Shinjo

at Mitsubishi Gas Chemical Co., Inc.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 April 2024 Paper

Application of higher absorption materials to the underlayer of EUV lithography

Tadashi Omatsu, Sachiko Shinjo, Masatoshi Echigo, Yuki Ishimaru, Takahiro Kozawa

Proceedings Volume 12957, 1295723 (2024) https://doi.org/10.1117/12.3012067

KEYWORDS: Extreme ultraviolet lithography, Absorption, Extreme ultraviolet, Photons, Photoresist processing, Electrons, Iodine, Stochastic processes

Read Abstract +

Proceedings Article | 3 October 2018 Paper

EUV sensitizer for resists and spin-on-carbon materials

Takashi Sato, Yuta Togashi, Sachiko Shinjo, Takumi Toida, Takashi Makinoshima, Masatoshi Echigo

Proceedings Volume 10809, 108091X (2018) https://doi.org/10.1117/12.2323096

KEYWORDS: Extreme ultraviolet, Absorption, Transmittance, Chemical elements, Iodine, Extreme ultraviolet lithography, Mass attenuation coefficient, Resist chemistry

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years