Prof. Sai Peng Wong
Professor at Chinese Univ of Hong Kong
SPIE Involvement:
Conference Program Committee | Author
Publications (11)

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Oxides, Thin films, Chemical species, Annealing, Ions, Magnetism, Oxygen, Cobalt, Transmission electron microscopy, Image filtering

Proceedings Article | 21 December 2005
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Carbon, Annealing, Tungsten, Dielectrics, Ions, Silicon, Atomic force microscopy, Ion beams, Silicon carbide, Nanocomposites

Proceedings Article | 23 February 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Iron, Annealing, Luminescence, Ions, Silicon, Electroluminescence, Transmission electron microscopy, Liquid crystal on silicon, Ion beams, Molybdenum

Proceedings Article | 8 December 2004
Proc. SPIE. 5774, Fifth International Conference on Thin Film Physics and Applications
KEYWORDS: Carbon, Thin films, Metals, Annealing, X-ray diffraction, Silicon, Raman scattering, Silicon carbide, Molybdenum, Plasma

Proceedings Article | 2 April 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Thin films, Iron, Chemical species, Annealing, Ions, Magnetism, Cobalt, Transmission electron microscopy, Frequency modulation, Fermium

Proceedings Article | 30 May 2003
Proc. SPIE. 5144, Optical Measurement Systems for Industrial Inspection III
KEYWORDS: Semiconductors, Photoelasticity, Modulation, Birefringence, Sensors, Silicon, Amplifiers, Polarizers, Semiconducting wafers, Signal detection

Showing 5 of 11 publications
Conference Committee Involvement (4)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
11 December 2006 | Adelaide, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
12 December 2005 | Brisbane, Australia
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
Device and Process Technologies for Microelectronics, MEMS, and Photonics
10 December 2003 | Perth, Australia
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