Dr. Sajan Marokkey
SPIE Involvement:
Publications (24)

Proceedings Article | 6 September 2018 Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, Calibration, Etching, Metals, Error analysis, Computer simulations, Directed self assembly, Extreme ultraviolet lithography, Critical dimension metrology, Process modeling

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10451, Photomask Technology 2017
KEYWORDS: Temporal coherence, Particles, Nickel, Pellicles, Transmittance, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Nanoimprint lithography

Proceedings Article | 27 April 2017 Presentation + Paper
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Nanotechnology, Logic, Optical lithography, Data modeling, Calibration, 3D modeling, Very large scale integration, Research facilities, System on a chip

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Electron beams, Optical lithography, Data modeling, Scattering, Photons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, High volume manufacturing, Semiconducting wafers

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Data modeling, Calibration, Metals, Interfaces, 3D modeling, Scanning electron microscopy, Photomasks, Directed self assembly, Computational lithography, Picosecond phenomena, Optimization (mathematics)

Showing 5 of 24 publications
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