Dr. Salvatore Castorina
at Univ degli Studi di Catania
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Ferroelectric materials, Optical sensing, Resonators, Sensors, Metals, Silicon, Transducers, Semiconducting wafers, Prototyping

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: CMOS sensors, Sensors, Metals, Directed energy weapons, Humidity, CMOS technology, Chemical elements, Prototyping, Standards development, Temperature metrology

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