Sam K. Doran
Independent Contractor at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Metrology, Clocks, Metals, Computer programming, Beam shaping, Double patterning technology, Analog electronics, Photomicroscopy, Semiconducting wafers

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