Sam Yuspeh
at
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 8, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Metrology, Laser energy, Ions, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | March 20, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Carbon dioxide, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Laser beam diagnostics, Pulsed laser operation, Plasma, Tin, Absorption

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Spectroscopy, Ions, Silicon, Diagnostics, Laser ablation, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Optical spheres, Plasmas, Diagnostics, Extreme ultraviolet, Extreme ultraviolet lithography, Laser beam diagnostics, Performance modeling, Temperature metrology, Tin, Absorption

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