Dr. Sameet K. Shriyan
Sr. Systems Design Engineer at KLA Corp
SPIE Involvement:
Author
Area of Expertise:
Optics , Holography , Nanophotonics , Electron optics , e-beam lithography
Profile Summary

Electron optics, E-beam lithography
Publications (6)

Proceedings Article | 26 March 2013 Paper
Proceedings Volume 8680, 86801C (2013) https://doi.org/10.1117/12.2010865
KEYWORDS: Electroluminescence, Raster graphics, Scattering, Monte Carlo methods, Silica, Diffusion, Laser scattering, Quantization, Modulation transfer functions, Backscatter

SPIE Journal Paper | 3 July 2012
Sameet Shriyan, Adam Fontecchio, Elizabeth Schundler, Craig Schwarze
JARS, Vol. 6, Issue 01, 063549, (July 2012) https://doi.org/10.1117/12.10.1117/1.JRS.6.063549
KEYWORDS: Optical filters, Hyperspectral imaging, Liquid crystals, Image filtering, Digital filtering, Thin films, Polymer thin films, Electro optic polymers, Polarization, Reflection

Proceedings Article | 21 March 2012 Paper
Mark McCord, Paul Petric, Upendra Ummethala, Allen Carroll, Shinichi Kojima, Luca Grella, Sameet Shriyan, Charles Rettner, Chris Bevis
Proceedings Volume 8323, 832311 (2012) https://doi.org/10.1117/12.919744
KEYWORDS: Semiconducting wafers, Electron beam lithography, Wafer-level optics, Lithography, Metrology, Integrated optics, Electron beams, Reflectivity, Silicon, Modulation

Proceedings Article | 23 September 2010 Paper
Sameet Shriyan, C. William Hicks, Adam Fontecchio
Proceedings Volume 7750, 77501G (2010) https://doi.org/10.1117/12.871816
KEYWORDS: Liquid crystals, Diffusion, Polymers, Carbon nanotubes, Electro optics, Diffraction, Polymerization, Diffraction gratings, Holography, Anisotropy

Proceedings Article | 13 August 2010 Paper
Sameet Shriyan, Adam Fontecchio
Proceedings Volume 7812, 78120S (2010) https://doi.org/10.1117/12.860727
KEYWORDS: Optical filters, Digital filtering, Hyperspectral imaging, Image filtering, Reflection, Imaging systems, Modulation, Thin films, Electro optics, Holography

Showing 5 of 6 publications
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