Sami Abada
at Labo Automatiq Analyses Systemes;Laas Cnrs
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 2 May 2014
Proc. SPIE. 9130, Micro-Optics 2014
KEYWORDS: Optical lithography, Polymers, Ultraviolet radiation, Silicon, Printing, Micro optics, Microlens, Photomasks, Vertical cavity surface emitting lasers, Semiconducting wafers

Proceedings Article | 2 May 2014
Proc. SPIE. 9130, Micro-Optics 2014
KEYWORDS: Microelectromechanical systems, Gold, Titanium, Electrodes, Polymers, 3D modeling, 3D metrology, Microopto electromechanical systems, Microlens, Vertical cavity surface emitting lasers

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