Dr. Sami Musa
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Semiconductors, Lithography, Refractive index, Metrology, Polarization, Photomasks, Optical alignment, Semiconducting wafers, Signal detection, Overlay metrology

PROCEEDINGS ARTICLE | September 9, 2004
Proc. SPIE. 5380, Optical Data Storage 2004
KEYWORDS: Diffraction, Waveguides, Spatial frequencies, Near field, Integrated optics, Phase measurement, Optical recording, Signal detection, Optical discs, Near field optics

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