Mr. Sami K. Myllymaki
at Univ of Oulu
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | April 1, 2010
JM3 Vol. 9 Issue 02
KEYWORDS: Resonators, Silicon, Semiconducting wafers, Microresonators, Reactive ion etching, Electrodes, Capacitance, Silicon films, Domes, Plasma enhanced chemical vapor deposition

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Thin films, Electronics, Resonators, Electrodes, Silicon, Silicon films, Finite element methods, Transistors, Device simulation

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