Samir Bendib
at Groupe ESIEE
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 November 2001
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Modeling, Microfluidics, Sensors, Diffusers, Diodes, Deep reactive ion etching, Micromachining, Picosecond phenomena, Semiconducting wafers, Prototyping

Proceedings Article | 19 November 2001
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Actuators, Modeling, Microfluidics, Etching, Electrodes, Silicon, Diodes, Semiconducting wafers, Prototyping, Wafer bonding

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