Dr. Samir Derrough
at Commissariat à l'Energie Atomique
SPIE Involvement:
Publications (4)

Proceedings Article | 15 May 2010 Paper
Raluca Tiron, Samir Derrough, Hervé Fontaine, Sylviane Cetre, Damien Perret, James Thackeray, Patrick Paniez
Proceedings Volume 7545, 75450G (2010) https://doi.org/10.1117/12.863150
KEYWORDS: Semiconducting wafers, Polymers, Diffusion, Ionization, Sensors, Molecules, Statistical analysis, Chromatography, Spectroscopy, Lithography

Proceedings Article | 26 March 2010 Paper
Samir Derrough, Raluca Tiron, Damien Perret, James Thackeray, Claire Sourd, Patrick Paniez
Proceedings Volume 7639, 763937 (2010) https://doi.org/10.1117/12.846087
KEYWORDS: Diffusion, Lithography, Temperature metrology, Chemically amplified resists, Photoresist processing, Glasses, Line edge roughness, Systems modeling, Thermal analysis, Complex systems

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69231D (2008) https://doi.org/10.1117/12.769466
KEYWORDS: Ions, Boron, Atomic force microscopy, Semiconducting wafers, Scanning electron microscopy, Fourier transforms, Silicon, Critical dimension metrology, Lithography, Monte Carlo methods

Proceedings Article | 16 May 2007 Paper
C. Petitdidier, R. Tiron, S. Derrough, C. Sourd, L. Koscianski, B. Mortini
Proceedings Volume 6591, 65910I (2007) https://doi.org/10.1117/12.724202
KEYWORDS: Glasses, Polymethylmethacrylate, Polymers, Temperature metrology, Thin films, Lithography, Silicon films, Polymer thin films, Silicon, Microelectronics

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