Dr. Samir Ilias
Sr. Research Scientist at INO
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Profile Summary

Dr. Samir Ilias has over 16 years of experience in engineering and R&D gained from working in both academia and private industry. He received his Ph.D. in Materials Science & Engineering from the University of Paris-Sud in France.

He joined INO’s microfabrication group in the beginning of 2001 where he was involved in the development of various technologies implementing MEMS devices including micromirrors and uncooled microbolometer arrays. He has been leading for years the manufacturing of uncooled bolometric FPAs for infrared and THz applications within either R&D or technology transfer projects. He has also contributed to various projects integrating thin-film coating technologies for civilian and space applications.
Publications (15)

PROCEEDINGS ARTICLE | November 21, 2017
Proc. SPIE. 10566, International Conference on Space Optics — ICSO 2008

PROCEEDINGS ARTICLE | May 20, 2016
Proc. SPIE. 9819, Infrared Technology and Applications XLII
KEYWORDS: Bolometers, Bolometers, Readout integrated circuits, Readout integrated circuits, Microbolometers, Gold, Sensors, Interference (communication), Black bodies, Active sensors, Camera shutters, Indium oxide

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8975, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
KEYWORDS: Staring arrays, Bolometers, Microelectromechanical systems, Mirrors, Sensors, Electrodes, Nickel, Dysprosium, Semiconducting wafers, Assembly equipment

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Gold, Mirrors, Etching, Electrodes, Nickel, Silicon, Photoresist materials, Micromirrors, Semiconducting wafers, Electroplating

PROCEEDINGS ARTICLE | September 23, 2010
Proc. SPIE. 7750, Photonics North 2010
KEYWORDS: Infrared detectors, Gold, Thermography, Sensors, Nitrogen, Optical coatings, Reflectivity, Micromachining, Deposition processes, Indium oxide

PROCEEDINGS ARTICLE | September 23, 2010
Proc. SPIE. 7750, Photonics North 2010
KEYWORDS: Microelectromechanical systems, Actuators, Gold, Sensors, Manufacturing, Micromirrors, Microfabrication, Photomicroscopy, Semiconducting wafers, Indium oxide

Showing 5 of 15 publications
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