Samira farsinezhad
at
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | June 17, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Semiconducting wafers, Micro raman spectroscopy, Raman spectroscopy, Silicon, Copper, Microelectromechanical systems, Deep reactive ion etching, Low pressure chemical vapor deposition, Annealing, Boron

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