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Samuel K. Doran
at GlobalFoundries
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 20 August 2001 Paper
PREVAIL-EPL alpha tool electron optics subsystem
Hans Pfeiffer, Rajinder Dhaliwal, Steven Golladay, Samuel Doran, Michael Gordon, Rodney Kendall, Jon Lieberman, David Pinckney, Robert Quickle, Christopher Robinson, James Rockrohr, Werner Stickel, Eileen Tressler
Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436711
KEYWORDS: Reticles, Semiconducting wafers, Charged-particle lithography, Wafer-level optics, Control systems, Electronics, Fiber optic illuminators, Lenses, Imaging systems, Electron beam lithography
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