Dr. Samuel O'Mullane
Applications Scientist at SUNY Polytechnic Institute
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 21 October 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Finite element methods, Copper, Plasmons, 3D modeling, Plasmonics, Dielectrics, Surface plasmons, Metals, Statistical modeling, Magnetism

Proceedings Article | 21 April 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Thin films, Ellipsometry, Plasmonics, Plasmons, Surface plasmons, Copper, Dielectrics, 3D modeling, Scatterometry, 3D metrology, Finite element methods, Critical dimension metrology, Chemical elements, Statistical modeling

SPIE Journal Paper | 3 August 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Line edge roughness, Silicon, Scatterometry, Data modeling, Optical components, Scanning electron microscopy, Picosecond phenomena, Chemical elements, Line width roughness, Optical properties

Proceedings Article | 10 April 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Optical components, Data modeling, Optical properties, Spatial frequencies, Silicon, Scatterometry, Critical dimension metrology, Line edge roughness, Chemical elements, Inverse optics

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Oxides, Optical components, Ellipsometry, Plasmonics, Plasmons, Cadmium, Polarization, Copper, Optical proximity correction, Critical dimension metrology

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