Dr. Sandeep Kohli
Manager at Zygo Corporation
SPIE Involvement:
Publications (8)

Proceedings Article | 14 June 2023 Presentation + Paper
Proceedings Volume 12530, 125300C (2023) https://doi.org/10.1117/12.2663465
KEYWORDS: Silver, Corrosion, Metals, Protective coatings, Reflectivity, Optical coatings, Oxidation

Proceedings Article | 4 March 2022 Open Access Presentation + Paper
Proceedings Volume 11982, 119820C (2022) https://doi.org/10.1117/12.2610006
KEYWORDS: Antireflective coatings, Optical coatings, Laser induced damage, Laser damage threshold, Reflectivity, Optics manufacturing, Lithography

Proceedings Article | 26 September 2019 Paper
Narasimhan Srinivasan, Katrina Rook, Paul Turner, Tania Henry, Kenji Yamamoto, Devlin Donnelly, Thu Van Nguyen, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devahasayam
Proceedings Volume 11147, 111470N (2019) https://doi.org/10.1117/12.2536935
KEYWORDS: Silicon, Molybdenum, Multilayers, Extreme ultraviolet, Atomic force microscopy, Photomasks, Surface roughness, Ion beams, Reflectivity, Interfaces

Proceedings Article | 26 March 2019 Presentation + Paper
Narasimhan Srinivasan, Katrina Rook, Vincent Ip, Meng Lee, Sandeep Kohli, Frank Cerio, Adrian Devasahayam
Proceedings Volume 10957, 109570O (2019) https://doi.org/10.1117/12.2515098
KEYWORDS: Etching, Ion beams, Photomasks, Extreme ultraviolet, Nickel, Optical lithography, Ruthenium, Critical dimension metrology, Ions, Cobalt

Proceedings Article | 3 October 2018 Presentation + Paper
Katrina Rook, Meng Lee, Narasimhan Srinivasan, Vincent Ip, Sandeep Kohli, Mathew Levoso, Frank Cerio, Adrian Devasahayam
Proceedings Volume 10809, 108090F (2018) https://doi.org/10.1117/12.2501832
KEYWORDS: Etching, Ruthenium, Nickel, Ion beams, Extreme ultraviolet, Photomasks, Optical lithography, Ions, Photoresist materials, Multilayers

Showing 5 of 8 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top