Significant advances have been made in the field of fabrication of optical components over the years. While plano and
spherical surfaces are polished mostly by full aperture polishers made of pitch or polyurethane pads, no such approach is
possible for aspheric surfaces as polisher needs to conform to the changing local curvature of aspheric surface. For such
aspheric and freeform surfaces sub aperture polishing is a very attractive option as it forms a small polishing spot over
the surface of the optics and the path of this spot in multi axis configuration is precisely controlled by the computer. This
polishing process follows a deterministic approach and material removal information is very much necessary to control
surface form or surface accuracy of the optical component. Here we have carried out the polishing of several glass
substrates to find out the response of various glass types to this polishing process.