Dr. Sandip Halder
at imec
SPIE Involvement:
Author
Publications (38)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Metrology, Defect detection, Inspection, Scanning electron microscopy, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Statistical methods, Optical correlators, Stochastic processes

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Wafer-level optics, Lithography, Electron beam lithography, Inspection, Optical inspection, Wafer inspection, Extreme ultraviolet, Semiconducting wafers, Optics manufacturing, Stochastic processes

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Electron beam lithography, Metrology, Defect detection, Etching, Metals, Inspection, Extreme ultraviolet, Ruthenium

Proceedings Article | 22 February 2021 Poster + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Lithography, Optical lithography, Metals, Ultraviolet radiation, Scanning electron microscopy, Optical inspection, Photomasks, Extreme ultraviolet, Stochastic processes, Back end of line

Showing 5 of 38 publications
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