Dr. Sandip Halder
at IMEC
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 25 June 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Machine learning, Metrology, Inspection, Process control, Optical lithography, Capacitance, Lithography

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Machine learning, Semiconducting wafers, Capacitance, Resistance, Critical dimension metrology, Etching, Process control, Diffractive optical elements, Oxides, Scatterometry

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Metrology, Extreme ultraviolet lithography, Distortion, Logic, Metals, Extreme ultraviolet, Inspection, Semiconducting wafers

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Etching, Optical lithography, Semiconducting wafers, Critical dimension metrology, Resistance, Magnetism, Photoresist processing, Manufacturing, Printing, Extreme ultraviolet lithography

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Scanning electron microscopy, Stochastic processes, Image quality, Extreme ultraviolet, Algorithm development, Image processing, Inspection, Photomask technology, Extreme ultraviolet lithography, Artificial neural networks

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Stochastic processes, Inspection, Extreme ultraviolet, Modulation, Semiconducting wafers, Extreme ultraviolet lithography, Optical inspection, Critical dimension metrology, Bridges, Lithography

Showing 5 of 24 publications
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