Sandrine Aubry
at ENSPS LSP
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 1, 2004
Proc. SPIE. 5456, Photon Management
KEYWORDS: Fabrication, Lithography, Diffraction, Finite-difference time-domain method, Diffractive optical elements, Etching, High power lasers, Reflectivity, Laser ablation, Photomasks

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