Prof. Sang Hoon Lee
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 12 February 2009
Proc. SPIE. 7245, Image Processing: Algorithms and Systems VII
KEYWORDS: Lithium, Synthetic aperture radar, Image processing, Denoising, Remote sensing, Image restoration, Image analysis, Monte Carlo methods, Stochastic processes, Magnetorheological finishing

Proceedings Article | 29 June 1998
Proc. SPIE. 3334, Optical Microlithography XI
KEYWORDS: Lithography, Deep ultraviolet, Control systems, Photomasks, Logic devices, Optical proximity correction, Convolution, Critical dimension metrology, Photoresist processing, Instrument modeling

Proceedings Article | 12 February 1997
Proc. SPIE. 3236, 17th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Lithography, Coherence (optics), Control systems, Photoresist materials, Photomasks, Optical proximity correction, Critical dimension metrology, Automatic control, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 12 February 1997
Proc. SPIE. 3236, 17th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Lithography, Electron beams, Scattering, Manufacturing, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Photomasks, Optical simulations, Convolution

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top