Sang-Hyeon Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Diffractive optical elements, Image processing, Error analysis, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers, Factor analysis

Proceedings Article | 14 May 2007 Paper
Proc. SPIE. 6607, Photomask and Next-Generation Lithography Mask Technology XIV
KEYWORDS: Diamond, Quartz, Chromium, Atomic force microscopy, Scanning electron microscopy, Transmittance, Photomasks, Critical dimension metrology, Neodymium, Adhesives

Proceedings Article | 14 July 2003 Paper
Proc. SPIE. 4991, Organic Photonic Materials and Devices V
KEYWORDS: Gold, Carbon, Nanoparticles, Metals, Particles, Composites, Chemical vapor deposition, Polymerization, Atmospheric particles, Carbon nanotubes

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