We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a
deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the
fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter
and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A
fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe
sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than
the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to
make an approach to a steep angle surface of a work piece with high aspect ratio.