Sang-Uk Lee
at MagnaChip Semiconductor Ltd
SPIE Involvement:
Publications (7)

Proceedings Article | 7 March 2008 Paper
Proceedings Volume 6924, 69242W (2008)
KEYWORDS: Optical proximity correction, Lithography, Critical dimension metrology, Photomasks, Optical lithography, Lithographic illumination, Semiconducting wafers, Resolution enhancement technologies, Image processing, Scanners

Proceedings Article | 16 November 2007 Paper
Proceedings Volume 6730, 673058 (2007)
KEYWORDS: Optical proximity correction, Systems modeling, Data modeling, Diffusion, Model-based design, Calibration, Lithography, Critical dimension metrology, Process modeling, Image processing

Proceedings Article | 1 November 2007 Paper
Proceedings Volume 6730, 67303W (2007)
KEYWORDS: Optical proximity correction, Semiconducting wafers, Lithography, Metals, Photomasks, Databases, Reticles, Optical lithography, Logic, Bridges

Proceedings Article | 5 April 2007 Paper
Proceedings Volume 6518, 65183W (2007)
KEYWORDS: Photomasks, Optical proximity correction, Optical lithography, Lithography, Diffraction, Data modeling, Process modeling, Optical properties, Semiconductor manufacturing, Bridges

Proceedings Article | 4 April 2007 Paper
Proceedings Volume 6518, 65180C (2007)
KEYWORDS: Data modeling, Critical dimension metrology, Optical proximity correction, Atomic force microscopy, Scanning electron microscopy, Semiconducting wafers, Wafer-level optics, Statistical modeling, Electron beams, Metrology

Showing 5 of 7 publications
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