Sang Wook Ryu
at Dongbu HiTek
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Oxides, Diffractive optical elements, Etching, Sputter deposition, Metals, Ions, Photomasks, Aluminum, Line edge roughness, Tin

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Oxides, Optical lithography, Diffractive optical elements, Etching, Polymers, Ions, Scanning electron microscopy, LCDs, Reactive ion etching, Plasma

Proceedings Article | 26 March 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Light sources, Optical lithography, Silica, Etching, Dry etching, Image processing, Silicon, Chemistry, Scanning electron microscopy, Chemical mechanical planarization

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