Mr. Sang Jeen Hong
Research Assistant at Georgia Institute of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Semiconductors, Principal component analysis, Data modeling, Etching, Data acquisition, Process control, Neural networks, Plasma etching, Reactive ion etching, Process modeling

PROCEEDINGS ARTICLE | July 15, 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Principal component analysis, Data modeling, Sensors, Etching, Emission spectroscopy, Neural networks, Reactive ion etching, Gallium, Plasma, Neurons

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