Mr. Sang-Jin Kim
Senior Engineer at SAMSUNG Electro-Mechanics Co Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Electron beam lithography, Metrology, Defect detection, Metals, Scanners, Inspection, Scanning electron microscopy, Photomasks, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | February 21, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Packaging, Diffraction, Mirrors, Ferroelectric materials, Modulation, Metals, Glasses, Silicon, Laser based displays, Diffraction gratings

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Distortion, Monte Carlo methods, Photomasks, Double patterning technology, Critical dimension metrology, Personal protective equipment, Phase shifts

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