Mr. Sang-Jin Kim Profile

Sang-Jin Kim

Senior Engineer at SAMSUNG Electro-Mechanics Co Ltd

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Publications (3)

PROCEEDINGS ARTICLE | March 28, 2017

The use of computational inspection to identify process window limiting hotspots and predict sub-15nm defects with high capture rate

Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI

KEYWORDS: Electron beam lithography, Metrology, Defect detection, Metals, Scanners, Inspection, Scanning electron microscopy, Photomasks, Critical dimension metrology, Semiconducting wafers

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PROCEEDINGS ARTICLE | February 21, 2008

A novel diffractive micro-optical modulator for mobile display applications

Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII

KEYWORDS: Packaging, Diffraction, Mirrors, Ferroelectric materials, Modulation, Metals, Glasses, Silicon, Laser based displays, Diffraction gratings

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PROCEEDINGS ARTICLE | May 12, 2004

Era of double exposure in 70 nm node DRAM cell

Proc. SPIE. 5754, Optical Microlithography XVIII

KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Distortion, Monte Carlo methods, Photomasks, Double patterning technology, Critical dimension metrology, Personal protective equipment, Phase shifts

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