Dr. Sangbong Lee
at Nanometrics Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Cadmium, Data modeling, Quartz, Pellicles, Scatterometry, Photomasks, Critical dimension metrology, Semiconducting wafers, Scatter measurement

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