Sang-Ho Yun
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (4)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552Q (2024)
KEYWORDS: Semiconducting wafers, Metrology, Extreme ultraviolet lithography, Calibration, Extreme ultraviolet, Diffraction gratings, Scanners, Diffraction, Printing, Optical metrology

Proceedings Article | 18 March 2015 Paper
Young-Sun Nam, Sunny Kim, Ju Hee Shin, Young Sin Choi, Sang Ho Yun, Young Hoon Kim, Si Woo Shin, Jeong Heung Kong, Young Seog Kang, Hun Hwan Ha
Proceedings Volume 9426, 942612 (2015)
KEYWORDS: Overlay metrology, Metrology, Semiconducting wafers, Diffraction, Target detection, Error analysis, Scanning electron microscopy, Statistical analysis, Manufacturing, Scanners

Proceedings Article | 4 April 2012 Paper
Boo-Hyun Ham, Sangho Yun, Min-Cheol Kwak, Soon Mok Ha, Cheol-Hong Kim, Suk-Woo Nam
Proceedings Volume 8324, 83240A (2012)
KEYWORDS: Overlay metrology, Semiconducting wafers, Scanners, Data modeling, Metrology, Error analysis, Front end of line, Back end of line, Photomasks, Nondestructive evaluation

Proceedings Article | 4 April 2012 Paper
Sangho Yun, Soon Mok Ha, Young Min Nam, Cheol-Hong Kim, Suk-Woo Nam
Proceedings Volume 8324, 832407 (2012)
KEYWORDS: Optical alignment, Refractive index, Overlay metrology, Etching, Optical lithography, Resistance, Signal attenuation, Carbon, Lithography, Semiconducting wafers

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