Mr. Sangjeoung Kim
Manager at Dongjin Semichem Co Ltd
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 26, 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Semiconductors, Lithography, Refractive index, Etching, Polymers, Materials processing, Reflectivity, Photoresist materials, Photoresist processing, Photorefractive polymers

PROCEEDINGS ARTICLE | March 23, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Polymers, Image processing, Molecules, Diffusion, Reflectivity, Image resolution, Extreme ultraviolet lithography, Line edge roughness, Photoresist processing

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Electron beam lithography, Reticles, Polymethylmethacrylate, Polymers, Chemistry, Photomasks, Extreme ultraviolet lithography, Mask making, Line edge roughness

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Optical lithography, Roads, Etching, Capillaries, Reflectivity, Atomic force microscopy, Scanning electron microscopy, Critical dimension metrology, Semiconducting wafers

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