Dr. Sangwoong Yoon
at Duksan UMT Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Antireflective coatings, Etching, Ultraviolet radiation, Dielectrics, Coating, Chemical analysis, Semiconducting wafers, Industrial chemicals, Liquids

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Ultraviolet radiation, Interfaces, Silicon, Resistance, Chemical vapor deposition, Double patterning technology, Thin film coatings, Semiconducting wafers, 193nm lithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top