Dr. Sannian Song Profile

Dr. Sannian Song

at Shanghai Institute of Microsystem and Information

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 28 February 2021 Paper

Paper

A comparative study of dry-etching nanophotonic devices on a LiNbO3-on-insulator material platform

Chen Shen, Chengli Wang, Yifan Zhu, Jinbo Wu, Yang Chen, Zhongxu Li, Kai Huang, Xiaomeng Zhao, Sannian Song, Jiaxiang Zhang, Xin Ou

Proceedings Volume 11781, 117810X (2021) https://doi.org/10.1117/12.2590415

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

N-doped Sn15Sb85 thin films for high speed and high thermal stability phase change memory application

Li Yuan, Yifeng Hu, Xiaoqin Zhu, Jianhao Zhang, Hua Zou, Jianzhong Xue, Long Zheng, Weihua Wu, Sannian Song, Zhitang Song

Proceedings Volume 9818, 98180V (2016) https://doi.org/10.1117/12.2246985

KEYWORDS: Thin films, Nitrogen, Doping, Crystals, Resistance, Technetium, Reflectivity, Picosecond phenomena, Surface roughness, Atomic force microscopy

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Te-free environmental materials of TixSb2.19Se applied in phase change memory

Yueqin Zhu, Sannian Song, Le Li, Huaqing Xie, Zhitang Song, Bo Liu, Junxing Wu

Proceedings Volume 9818, 98180T (2016) https://doi.org/10.1117/12.2246980

KEYWORDS: Crystals, Transmission electron microscopy, Sputter deposition, Antimony, Technetium, Selenium, Resistance, Tellurium, Diffraction, Doping

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Phase change properties of Ti-Sb-Te thin films deposited by thermal atomic layer deposition

Sannian Song, Lanlan Shen, Zhitang Song, Dongning Yao, Tianqi Guo, Le Li, Bo Liu, Liangcai Wu, Yan Cheng, Yuqiang Ding, Songlin Feng

Proceedings Volume 9818, 98180N (2016) https://doi.org/10.1117/12.2246211

KEYWORDS: Atomic layer deposition, Thin film deposition, Thin films, Resistance, Crystals, Chalcogenides, Chemical vapor deposition, Scanning electron microscopy, Fast packet switching, Switching

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Reactive ion etching effects on carbon-doped Ge2Sb2Te5 phase change material in CF4/Ar plasma

Lanlan Shen, Sannian Song, Zhitang Song, Le Li, Tianqi Guo, Bo Liu, Liangcai Wu, Yan Cheng, Songlin Feng

Proceedings Volume 9818, 98180M (2016) https://doi.org/10.1117/12.2245726

KEYWORDS: Crystals, Reactive ion etching, Plasma, Carbon, Etching, Polymers, Argon, Fluorine, Ions, Anisotropy

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Electrical properties of Cr-doped Sb2Te3 phase change material

Qing Wang, Bo Liu, Yangyang Xia, Yonghui Zheng, Sannian Song, Yan Cheng, Zhitang Song, Songlin Feng

Proceedings Volume 9818, 98180H (2016) https://doi.org/10.1117/12.2245039

KEYWORDS: Crystals, Chromium, Chemical species, Antimony, Semiconductors, Resistance, Tellurium, Electrons, Chalcogenides, Transmission electron microscopy

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Microstructure and electrical properties of Sb2Te phase-change material

Guangyu Liu, Liangcai Wu, Tao Li, Feng Rao, Sannian Song, Bo Liu, Zhitang Song

Proceedings Volume 9818, 98180S (2016) https://doi.org/10.1117/12.2246978

KEYWORDS: Optical discs, Crystals, Resistance, Transmission electron microscopy, Tellurium, Antimony, Doping, Chemical species, Diffraction, Chalcogenides

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Investigation of (SiC)0.85-Sb3Te alloy for high-reliability PCM applications

Tianqi Guo, Sannian Song, Le Li, Lanlan Shen, Bo Liu, Zhitang Song, Ming Qi, Songlin Feng

Proceedings Volume 9818, 98180U (2016) https://doi.org/10.1117/12.2246984

KEYWORDS: Silicon carbide, Doping, Crystals, Resistance, Tellurium, Transmission electron microscopy, Silicon, Antimony, Reliability, Switching

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

N-doped GeTe phase change material for high-temperature data retention and low-power consumption

Jianhao Zhang, Yifeng Hu, Xiaoqin Zhu, Hua Zou, Li Yuan, Jianzhong Xue, Yongxing Sui, Weihua Wu, Sannian Song, Zhitang Song

Proceedings Volume 9818, 981809 (2016) https://doi.org/10.1117/12.2243757

KEYWORDS: Ferroelectric materials, Nitrogen, Doping, Crystals, Thin films, Resistance, Reflectivity, Picosecond phenomena, Reliability, Surface roughness

Read Abstract +

Proceedings Article | 12 October 2016 Paper

Paper

Comparison of thermal stabilities between Zr9(Ge2Sb2Te5)91 and Ge2Sb2Te5 phase change films

Zengguang Li, Yegang Lu, Yadong Ma, Sannian Song, Xiang Shen, Guoxiang Wang, Shixun Dai, Zhitang Song

Proceedings Volume 9818, 981808 (2016) https://doi.org/10.1117/12.2242489

KEYWORDS: Crystals, Resistance, Zirconium, Raman spectroscopy, Germanium, Antimony, Tellurium, Technetium, Annealing, Spectroscopy

Read Abstract +

Proceedings Article | 24 January 2013 Paper

Paper

Investigation of Sb-rich Sb-Te binary films used as phase change material

Yan Cheng, Yifeng Gu, Zhitang Song, Sannian Song, Feng Rao, Liangcai Wu, Bo Liu, Songlin Feng

Proceedings Volume 8782, 87820H (2013) https://doi.org/10.1117/12.2014873

KEYWORDS: Crystals, Antimony, Resistance, Thin films, Transmission electron microscopy, Tellurium, Binary data, Crystallography, Silicon, Temperature metrology

Read Abstract +

Proceedings Article | 24 January 2013 Paper

Paper

Crystallization behavior of Ge2Te3-TiO2 film for phase-change random access memory application

Yegang Lu, Sannian Song, Zhitang Song, Yan Cheng, Liangcai Wu, Bo Liu

Proceedings Volume 8782, 87820K (2013) https://doi.org/10.1117/12.2018637

KEYWORDS: Crystals, Transmission electron microscopy, Resistance, Particles, Annealing, In situ metrology, Composites, Temperature metrology, Crystallography, Titanium dioxide

Read Abstract +

Showing 5 of 12 publications

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement