Prof. Santiago M. Olaizola
Researcher at CEIT-IK4
SPIE Involvement:
Conference Program Committee | Author
Publications (8)

Proceedings Article | 22 March 2019
Proc. SPIE. 10906, Laser-based Micro- and Nanoprocessing XIII
KEYWORDS: Nanostructuring, Polarization, Birefringence, Coating, Reflectivity, Wave plates, Scanning electron microscopy, Ultrafast lasers, Thin film coatings

Proceedings Article | 30 May 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Thin films, Lithography, Electronics, Optical lithography, Sputter deposition, Laser processing, Optoelectronics, Thermal effects, Zinc oxide, Thermal modeling, Thermodynamics, N-type semiconductors

Proceedings Article | 24 February 2009
Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
KEYWORDS: Lithography, Electron beam lithography, Mirrors, Beam splitters, Optical lithography, Laser processing, Control systems, Photoresist materials, Pulsed laser operation, Laser systems engineering

Proceedings Article | 25 June 2007
Proc. SPIE. 6593, Photonic Materials, Devices, and Applications II
KEYWORDS: Fabrication, Thin films, Lithography, Beam splitters, Optical lithography, Laser applications, Laser ablation, Photoresist materials, Laser crystals, Nanolithography

Proceedings Article | 12 June 2007
Proc. SPIE. 6593, Photonic Materials, Devices, and Applications II
KEYWORDS: Nanotechnology, Lithography, Electron beam lithography, Beam splitters, Optical lithography, Laser applications, Control systems, Scanning probe lithography, Nanolithography, Laser systems engineering

Showing 5 of 8 publications
Conference Committee Involvement (1)
Silicon Photonics and Photonic Integrated Circuits
7 April 2008 | Strasbourg, France
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