Sara Francés González
at Fraunhofer Institut fur Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2020
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

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