Dr. Sarah J. Lukes
Founder/CEO at Agile Focus Designs LLC
SPIE Involvement:
Publications (8)

Proceedings Article | 12 March 2014
Proc. SPIE. 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Microscopes, Monochromatic aberrations, Point spread functions, Mirrors, Electrodes, Silicon, Objectives, Semiconducting wafers

Proceedings Article | 16 February 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Microelectromechanical systems, Gold, Monochromatic aberrations, Mirrors, Electrodes, Glasses, Deformable mirrors, Objectives, Digital video discs, Optical discs

Proceedings Article | 7 February 2012
Proc. SPIE. 8248, Micromachining and Microfabrication Process Technology XVII
KEYWORDS: Microelectromechanical systems, Thin films, Etching, Ultraviolet radiation, Silicon, Manufacturing, Silicon films, Semiconducting wafers, Thin film devices, Temperature metrology

Proceedings Article | 14 February 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Microelectromechanical systems, Gold, Monochromatic aberrations, Mirrors, Etching, Dry etching, Electrodes, Microscopy, Silicon, Control systems

Proceedings Article | 17 February 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Microelectromechanical systems, Monochromatic aberrations, Mirrors, Imaging systems, Etching, Electrodes, Microscopy, Control systems, Deformable mirrors, Semiconducting wafers

Showing 5 of 8 publications
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