Dr. Sarah J. Lukes
Founder/CEO at Agile Focus Designs
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 12, 2014
Proc. SPIE. 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Microscopes, Monochromatic aberrations, Point spread functions, Mirrors, Electrodes, Silicon, Objectives, Semiconducting wafers

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Microelectromechanical systems, Gold, Monochromatic aberrations, Mirrors, Electrodes, Glasses, Deformable mirrors, Objectives, Digital video discs, Optical discs

PROCEEDINGS ARTICLE | February 7, 2012
Proc. SPIE. 8248, Micromachining and Microfabrication Process Technology XVII
KEYWORDS: Microelectromechanical systems, Thin films, Etching, Ultraviolet radiation, Silicon, Manufacturing, Silicon films, Semiconducting wafers, Thin film devices, Temperature metrology

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Microelectromechanical systems, Gold, Monochromatic aberrations, Mirrors, Etching, Dry etching, Electrodes, Microscopy, Silicon, Control systems

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Microelectromechanical systems, Monochromatic aberrations, Mirrors, Imaging systems, Etching, Electrodes, Microscopy, Control systems, Deformable mirrors, Semiconducting wafers

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Mirrors, Etching, Electrodes, Silicon, Control systems, Deformable mirrors, Semiconducting wafers

Showing 5 of 8 publications
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