Dr. Sasikaran Kandasamy
at Melbourne Ctr for Nanofabrication
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Microfluidics, Tissues, Interfaces, Silicon, In vivo imaging, Microfabrication, Semiconducting wafers, Natural surfaces, Systems modeling, In vitro testing

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Optical components, Reflectors, Etching, Dry etching, Silicon, Photomasks, Deep reactive ion etching, Wet etching, Semiconducting wafers, System on a chip

PROCEEDINGS ARTICLE | January 4, 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Gold, Thin films, Ferroelectric materials, Titanium, Sputter deposition, Platinum, Scanning electron microscopy, Photomicroscopy, Lead, Perovskite

PROCEEDINGS ARTICLE | February 28, 2005
Proc. SPIE. 5649, Smart Structures, Devices, and Systems II
KEYWORDS: Semiconductors, Thin films, Bismuth, Connectors, Thermoelectric materials, Antimony, Tellurium, P-type semiconductors, Temperature metrology, Instrument modeling

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Gold, Gas sensors, Sensors, Sputter deposition, Hydrogen, Computing systems, Zinc oxide, Acoustics, Atmospheric propagation, Atmospheric sensing

PROCEEDINGS ARTICLE | March 30, 2004
Proc. SPIE. 5274, Microelectronics: Design, Technology, and Packaging
KEYWORDS: Thin films, Gas sensors, Sensors, Electrodes, Tungsten, Hydrogen, Transducers, Zinc oxide, Molybdenum, Acoustics

Showing 5 of 6 publications
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