Satomi Higashibata
at IMEC/Toshiba Memory Europe GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Wafer-level optics, Optical filters, Metrology, Etching, Metals, Scanners, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Overlay metrology

Proceedings Article | 10 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Semiconductors, Reticles, Optical lithography, Atrial fibrillation, Sensors, Scanning electron microscopy, Photomasks, Semiconducting wafers, Polysomnography, Phase shifts

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