Mr. Satoru Egawa
at Univ of Tokyo
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Mirrors, X-rays, Data analysis, Metrology

PROCEEDINGS ARTICLE | October 25, 2016
Proc. SPIE. 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
KEYWORDS: Mirrors, X-ray microscopy, Magnetorheological finishing, Phase retrieval, Wavefronts, Microscopes, Nickel, Spatial frequencies, X-rays, Objectives

PROCEEDINGS ARTICLE | August 26, 2015
Proc. SPIE. 9588, Advances in X-Ray/EUV Optics and Components X
KEYWORDS: Mirrors, X-rays, Extreme ultraviolet, Geometrical optics, Wavefronts, X-ray optics, Chromatic aberrations, Spatial resolution, High harmonic generation, Free electron lasers

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX
KEYWORDS: Mirrors, Spatial resolution, Point spread functions, X-ray imaging, X-rays, Imaging systems, X-ray microscopy, Reflection, Optical alignment, Error analysis

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