Mr. Satoru Egawa
at Univ of Tokyo
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | September 7, 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Mirrors, Metrology, X-rays, Data analysis

PROCEEDINGS ARTICLE | October 25, 2016
Proc. SPIE. 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
KEYWORDS: Microscopes, Mirrors, Spatial frequencies, X-rays, Nickel, X-ray microscopy, Wavefronts, Phase retrieval, Objectives, Magnetorheological finishing

PROCEEDINGS ARTICLE | August 26, 2015
Proc. SPIE. 9588, Advances in X-Ray/EUV Optics and Components X
KEYWORDS: Chromatic aberrations, Mirrors, X-ray optics, X-rays, Wavefronts, Extreme ultraviolet, High harmonic generation, Spatial resolution, Geometrical optics, Free electron lasers

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX
KEYWORDS: Point spread functions, Mirrors, Reflection, Imaging systems, Error analysis, X-rays, X-ray microscopy, Optical alignment, Spatial resolution, X-ray imaging

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