Satoru Shimura
Research Engg at Tokyo Electron Kyushu Ltd
SPIE Involvement:
Publications (53)

Proceedings Article | 10 April 2024 Poster
Proceedings Volume PC12953, PC129530Y (2024)
KEYWORDS: Yield improvement, Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Etching, Lithography, Tin, Semiconductors, Integrated circuits, Inspection

Proceedings Article | 28 November 2023 Presentation + Paper
Proceedings Volume PC12750, PC127500G (2023)
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Lithography, Semiconductors, Integrated circuits, Industry, Fiber optic illuminators, Fabrication, Etching

Proceedings Article | 22 November 2023 Poster
Proceedings Volume PC12750, PC1275011 (2023)
KEYWORDS: Extreme ultraviolet, Etching, Plasma etching, Photoresist materials, Optical lithography, Critical dimension metrology, Plasma, Metal oxides, Lithography, High volume manufacturing

Proceedings Article | 1 May 2023 Poster + Paper
Proceedings Volume 12498, 124981E (2023)
KEYWORDS: Tin, Extreme ultraviolet, Optical lithography, Silicon carbide, Spin on carbon materials, Lithography, Extreme ultraviolet lithography, Amorphous carbon

Proceedings Article | 1 May 2023 Poster + Paper
Proceedings Volume 12498, 1249822 (2023)
KEYWORDS: Extreme ultraviolet, Metal oxides, Line edge roughness, Extreme ultraviolet lithography, Optical lithography, Inspection, Interfaces, Etching, Plasma etching, Photoresist processing

Showing 5 of 53 publications
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