Satoru Shimura
Research engineer at Tokyo Electron Kyushu Ltd
SPIE Involvement:
Author
Publications (33)

Proceedings Article | 17 March 2021 Poster + Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Oxides, Optical lithography, Contamination, Metals, Coating, Printing, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithographic illumination, Etching, Particles, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Photoresist processing, Stochastic processes

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Etching, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Semiconductors, Lithography, Etching, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Photoresist processing, Stochastic processes, Liquids

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Optical lithography, Etching, Scanning electron microscopy, Extreme ultraviolet lithography, Head-mounted displays, Chemical elements, Adhesives

Showing 5 of 33 publications
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