Prof. Satoru Takahashi
Professor at Univ of Tokyo
SPIE Involvement:
Conference Program Committee | Author
Publications (24)

Proceedings Article | 15 June 2020 Paper
Proc. SPIE. 11523, Optical Technology and Measurement for Industrial Applications 2020
KEYWORDS: Diffraction, Remote sensing, Control systems, Optical testing, Near field scanning optical microscopy, Free space optics, Spatial resolution, Optics manufacturing, Near field optics, Fusion energy

Proceedings Article | 26 March 2019 Presentation + Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Edge detection, Metrology, Optical lithography, Image processing, Scanning electron microscopy, Transmission electron microscopy, Ion beams, Line width roughness, Semiconducting wafers

SPIE Journal Paper | 8 September 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Line width roughness, Extreme ultraviolet, Fin field effect transistors, Edge detection, Semiconductors, Metrology, Ion beams, Electron microscopes, Line edge roughness, Transmission electron microscopy

Proceedings Article | 22 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Edge detection, Metrology, Fin field effect transistors, Denoising, Transmission electron microscopy, Extreme ultraviolet, Line width roughness, Line edge roughness

SPIE Journal Paper | 19 June 2017
OE Vol. 56 Issue 06
KEYWORDS: Laser optics, Laser development, Spherical lenses, Laser metrology, 3D metrology, Metrology, Optical testing, Sensors, Phase shifts

Showing 5 of 24 publications
Conference Committee Involvement (5)
Optical Technology and Measurement for Industrial Applications Conference
20 April 2021 | Chiba, Japan
Optical Technology and Measurement for Industrial Applications Conference
22 April 2020 | Yokohama, Japan
Optical Technology and Measurement for Industrial Applications Conference
23 April 2019 | Yokohama, Japan
Optomechatronic Sensors and Instrumentation II
3 October 2006 | Boston, Massachusetts, United States
Optomechatronic Sensors and Instrumentation
5 December 2005 | Sapporo, Japan
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