Satoshi Sekino
at Hitachi Construction Machinary Co Ltd
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 12 March 2012
JM3 Vol. 11 Issue 1
KEYWORDS: Atomic force microscope, Carbon nanotubes, Atomic force microscopy, Silicon, Calibration, Cadmium, Sensors, Signal detection, Eye, Distortion

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Eye, Sensors, Calibration, Silicon, Distortion, Atomic force microscopy, Deconvolution, Critical dimension metrology, Signal detection, Cerium

Proceedings Article | 3 April 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Error analysis, Manufacturing, Inspection, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Deconvolution, Semiconductor manufacturing, Photomicroscopy

Proceedings Article | 22 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Sensors, Calibration, Silicon, Distortion, Atomic force microscopy, Deconvolution, Signal detection, Cerium, Scanning transmission electron microscopy, Carbon nanotubes

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Metrology, Sensors, Scanners, Manufacturing, Atomic force microscopy, Photoresist materials, Very large scale integration, Semiconducting wafers, Chemical mechanical planarization, Carbon nanotubes

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