Satoshi Takada
at Hitachi High-Technologies Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Metrology, Silica, Scattering, Image processing, Crystals, Electrons, Manufacturing, Inspection, Laser scattering, Scanning electron microscopy, Monte Carlo methods, Selenium

PROCEEDINGS ARTICLE | April 5, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Optical lithography, Defect detection, Sensors, Copper, Electrons, Resistance, Inspection, Scanning electron microscopy, Cadmium sulfide, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top