Prof. Satoshi Takei
Chemist at Toyama Prefectural Univ
Profile Summary

Satoshi Takei is a professor in Toyama Prefectural University, and a visiting academic staff in Osaka University. He was a member in Nissan Chemical Industries from 1998 to 2010. In 2001, he was a visiting assignee in IMEC. In 2009, he was a visiting scientist of Prof. C. Grant Willson laboratory in University of Texas at Austin and NNIN.
Publications (54)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Carbon, Lithography, Electron beam lithography, Etching, Chemical species, Polymers, Image processing, Oxygen, Chemical reactions, Photoresist processing

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Ultraviolet radiation, Manufacturing, Transmittance, Nanoimprint lithography

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Optical lithography, Quartz, Ultraviolet radiation, Silicon, Oxygen, Scanning electron microscopy, Nanofibers, Nanoimprint lithography, Industrial chemicals

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Lithography, Nanostructures, Contamination, Ultraviolet radiation, Nanoimprint lithography, Photoresist processing, Nanoelectronics, Natural surfaces

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Solar cells, Crystals, Composites, Silicon, Electronic components, Antennas, Nanofibers, Crystallography, Temperature metrology

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Microelectromechanical systems, Semiconductors, Lithography, Electron beam lithography, Electron beams, Manufacturing, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist processing, Nanoelectromechanical systems

Showing 5 of 54 publications
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