Prof. Satoshi Takei
Chemist at Toyama Prefectural Univ
Profile Summary

Satoshi Takei is a professor in Toyama Prefectural University, and a visiting academic staff in Osaka University. He was a member in Nissan Chemical Industries from 1998 to 2010. In 2001, he was a visiting assignee in IMEC. In 2009, he was a visiting scientist of Prof. C. Grant Willson laboratory in University of Texas at Austin and NNIN.
Publications (58)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Quartz, Glasses, Ultraviolet radiation, Silicon, Coating, Nanoimprint lithography, Applied physics, Semiconducting wafers, Industrial chemicals, Liquids

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Lithography, Microscopes, Metals, Glasses, Ultraviolet radiation, Electronic components, 3D printing, Nanoimprint lithography

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Etching, Polymers, Coating, Bioalcohols, Microopto electromechanical systems, High volume manufacturing, Nanofabrication

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Microelectromechanical systems, Metals, X-rays, Digital cameras, 3D printing, Printing, Computed tomography, Laser cutting, Nanoimprint lithography, X-ray imaging

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Carbon, Lithography, Electron beam lithography, Etching, Chemical species, Polymers, Image processing, Oxygen, Chemical reactions, Photoresist processing

Showing 5 of 58 publications
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